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December 20th, 2007
Process tool systems
Abstract:
Nine systems will provide University of Southampton with leading-edge capabilities in the research and development of novel nanoelectronic, MEMS and photonic devices
Oxford Instruments has won an order for nine process tool systems, worth a total in excess of GBP 2.5 million, to equip a new cleanroom facility at the University of Southampton, UK. The new Mountbatten research complex will serve the world-leading research of the School of Electronics and Computer Science and the optoelectronics Research Centre.
Source:
electronicstalk.com
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