Home > News > Stanford buys Plasma-Therm deposition systems for Nanofabrication Facility
July 27th, 2010
Stanford buys Plasma-Therm deposition systems for Nanofabrication Facility
Abstract:
Plasma process equipment maker Plasma-Therm LLC of St Petersburg, FL, USA says that Stanford University has recently placed an order for two deposition tools (a VERSALINE HDPCVD system and a Shuttlelock PECVD system) to be installed at Stanford's Nanofabrication Facility.
Source:
semiconductor-today.com
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