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July 27th, 2010

Stanford buys Plasma-Therm deposition systems for Nanofabrication Facility

Abstract:
Plasma process equipment maker Plasma-Therm LLC of St Petersburg, FL, USA says that Stanford University has recently placed an order for two deposition tools (a VERSALINE HDPCVD system and a Shuttlelock PECVD system) to be installed at Stanford's Nanofabrication Facility.

Source:
semiconductor-today.com

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