Home > Press > Bruker Introduces Dektak XTL to Address Semiconductor Needs: New Stylus Profiler Enables Semi-Automated Measurements with Uncompromised 300mm Access
![]() |
Abstract:
Bruker (NASDAQ: BRKR) today announced the release of the Dektak XTL Stylus Profiler, extending its industry-leading stylus profilometry capabilities to 200 and 300 millimeter semiconductor wafer fabs and next-generation touch panel manufacturers. The system provides the most cost-effective, full 300-millimeter wafer solution for characterizing thin film step heights, resist step heights, line edge roughness, CMP dishing and erosion, as well as roll off amount (ROA). The Dektak XTL combines decades of stylus innovation with new features targeting QA/QC environments to enable increased accuracy and minimal operator intervention between loading and unloading samples.
"Bruker's Dektak XTL with a 12-inch stage is the most advanced system in its class," said Roger Lee, Integration Department Project Director for China Wafer Level CSP Co., Ltd. (WLCSP). "The system is stable and reliable, and it incorporates many powerful functionalities and ease-of-use features. Bruker's stylus profilers always lead the industry in technology, and they always meet our metrology requirements in production."
"Customers like WLCSP have been asking for a larger scale stylus measurement system to support their latest 300mm wafer factory needs with the accuracy and industry-proven repeatability of our traditional Dektak products," added Kent Heath, General Manager of Bruker's Stylus and Optical Metrology business unit. "With the Dektak XTL we have delivered on this need with its 5 nanometer repeatability, and we have built-in a new level of point-and-click automation for maximum productivity that is unrivaled in the industry. Our early access customers have been amazed by how intuitive it is to use for production and development applications."
####
About Bruker Corporation
Bruker Corporation is a leading provider of high-performance scientific instruments and solutions for molecular and materials research, as well as for industrial, diagnostics and applied analysis.
About Dektak XTL
The Dektak XTL features a small footprint with pneumatic passive isolation and a fully enclosed workstation with a wide, easily accessible interlocking door, making it suitable for demanding production floor environments. Its dual-camera architecture enables enhanced spatial awareness, and its high level of automation maximizes manufacturing throughput. Bruker’s exclusive Vision64® Advanced Production Interface (API) with pattern recognition optimizes the system for stringent QA/QC requirements and makes data collection an intuitive and repeatable process, minimizing operator-to-operator variability.
For more information, please click here
Contacts:
Stephen Hopkins
Marketing Communications
Bruker Nano Surfaces Division
T: +1 (520) 741-1044 x1022
Copyright © Bruker Corporation
If you have a comment, please Contact us.Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.
Related News Press |
News and information
Electrifying results shed light on graphene foam as a potential material for lab grown cartilage June 6th, 2025
Quantum computers simulate fundamental physics: shedding light on the building blocks of nature June 6th, 2025
A 1960s idea inspires NBI researchers to study hitherto inaccessible quantum states June 6th, 2025
Display technology/LEDs/SS Lighting/OLEDs
Efficient and stable hybrid perovskite-organic light-emitting diodes with external quantum efficiency exceeding 40 per cent July 5th, 2024
New organic molecule shatters phosphorescence efficiency records and paves way for rare metal-free applications July 5th, 2024
Thin films
Utilizing palladium for addressing contact issues of buried oxide thin film transistors April 5th, 2024
Understanding the mechanism of non-uniform formation of diamond film on tools: Paving the way to a dry process with less environmental impact March 24th, 2023
New study introduces the best graphite films: The work by Distinguished Professor Feng Ding at UNIST has been published in the October 2022 issue of Nature Nanotechnology November 4th, 2022
Thin-film, high-frequency antenna array offers new flexibility for wireless communications November 5th, 2021
Chip Technology
A 1960s idea inspires NBI researchers to study hitherto inaccessible quantum states June 6th, 2025
Programmable electron-induced color router array May 14th, 2025
Enhancing power factor of p- and n-type single-walled carbon nanotubes April 25th, 2025
Ultrafast plasmon-enhanced magnetic bit switching at the nanoscale April 25th, 2025
Announcements
Electrifying results shed light on graphene foam as a potential material for lab grown cartilage June 6th, 2025
Quantum computers simulate fundamental physics: shedding light on the building blocks of nature June 6th, 2025
A 1960s idea inspires NBI researchers to study hitherto inaccessible quantum states June 6th, 2025
Tools
Rice researchers harness gravity to create low-cost device for rapid cell analysis February 28th, 2025
New 2D multifractal tools delve into Pollock's expressionism January 17th, 2025
![]() |
||
![]() |
||
The latest news from around the world, FREE | ||
![]() |
![]() |
||
Premium Products | ||
![]() |
||
Only the news you want to read!
Learn More |
||
![]() |
||
Full-service, expert consulting
Learn More |
||
![]() |