Nanotechnology Now

Our NanoNews Digest Sponsors
Heifer International



Home > Press > Leti’s IDEAL and IMAGINE Programs Demonstrate Cost-effective Solutions to Extend 193nm Immersion Lithography for 1X Nodes

Abstract:
CEA-Leti said today that its multi-partner programs, IDEAL and IMAGINE, have demonstrated cost-effective solutions that extend 193nm immersion lithography for 1X nodes for critical levels such as contact and via, and for the cut layer, when multi-patterning is used.

Leti’s IDEAL and IMAGINE Programs Demonstrate Cost-effective Solutions to Extend 193nm Immersion Lithography for 1X Nodes

Grenoble, France | Posted on July 9th, 2013

Leti and Arkema launched the IDEAL program in 2011 to develop lithography techniques based on nanostructured polymers, using 300mm directed self-assembly (DSA) process and material solutions for 1X nodes. The partners, which include Sokudo, Tokyo Electron, STMicroelectronics and advanced academic laboratories, such as LTM and LCPO, have demonstrated DSA resolution capability down to sub-10nm half-pitch.

"IDEAL is addressing the limits of conventional optical lithography with a technological solution that offers potential cost-reduction opportunities," said Serge Tedesco, Leti's lithography program manager. Self-assembly lithography with block copolymer is a highly promising complementary technology due to its low manufacturing costs and its straightforward integration in existing device-manufacturing processes."

The collaboration also recently completed DSA process integration in Leti's 300mm pilot line and new specific modules have been implemented in the 300mm Sokudo DUO Track for coating, baking and PMMA removal, one of the key steps in DSA process implementation.

IMAGINE, a multiple electron-beam-lithography R&D program with a dozen partners, is focused on developing maskless lithography (ML2) based on MAPPER Lithography tools for high throughput.

The IMAGINE program this year will interface a 1,300-electron-beam tool (Matrix platform) with the Sokudo 300mm DUO Track, targeting a throughput of one wafer per hour. That will be followed by a 13,000-beam system producing a throughput of 10 wafers per hour in early 2015. The longer-term goal is a cluster of 10 modules allowing a throughput of 100 wph to support 1Xnm logic-nodes production.

Launched as a three-year project in 2009, IMAGINE was extended for four years in 2012. Besides Leti and MAPPER, the program also includes TSMC, STMicroelectronics, Nissan Chemical, TOK, Dow, JSR Micro, Sokudo, TEL, Mentor Graphics and Aselta Nanographics.

"These concrete results clearly show the industry that DSA and ML2 can extend 193nm immersion lithography by providing cost-effective solutions for critical-layer patterning," Tedesco said. "They also demonstrate the value of combining the broad and deep technological strengths of Leti, MAPPER, Arkema, and all our partners in programs focused on meeting the demands at 1X nodes."

####

About CEA-Leti
Leti is an institute of CEA, a French research-and-technology organization with activities in energy, IT, healthcare, defence and security. Leti is focused on creating value and innovation through technology transfer to its industrial partners. It specializes in nanotechnologies and their applications, from wireless devices and systems, to biology, healthcare and photonics. NEMS and MEMS are at the core of its activities. An anchor of the MINATEC campus, CEA-Leti operates 8,000-m² of state-of-the-art clean room space on 200mm and 300mm wafer platforms. It employs 1,700 scientists and engineers including 320 Ph.D. students and 200 assignees from partner companies. CEA-Leti owns more than 2,200 patent families.

For more information, please click here

Contacts:
CEA-Leti
+33 4 38 78 02 26


Agency
+33 6 64 52 81 10

Copyright © CEA-Leti

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

INRS and ELI deepen strategic partnership to train the next generation in laser science:PhD students will benefit from international mobility and privileged access to cutting-edge infrastructure June 6th, 2025

Electrifying results shed light on graphene foam as a potential material for lab grown cartilage June 6th, 2025

Quantum computers simulate fundamental physics: shedding light on the building blocks of nature June 6th, 2025

A 1960s idea inspires NBI researchers to study hitherto inaccessible quantum states June 6th, 2025

Chip Technology

A 1960s idea inspires NBI researchers to study hitherto inaccessible quantum states June 6th, 2025

Programmable electron-induced color router array May 14th, 2025

Enhancing power factor of p- and n-type single-walled carbon nanotubes April 25th, 2025

Ultrafast plasmon-enhanced magnetic bit switching at the nanoscale April 25th, 2025

Nanoelectronics

Interdisciplinary: Rice team tackles the future of semiconductors Multiferroics could be the key to ultralow-energy computing October 6th, 2023

Key element for a scalable quantum computer: Physicists from Forschungszentrum Jülich and RWTH Aachen University demonstrate electron transport on a quantum chip September 23rd, 2022

Reduced power consumption in semiconductor devices September 23rd, 2022

Atomic level deposition to extend Moore’s law and beyond July 15th, 2022

Discoveries

Researchers unveil a groundbreaking clay-based solution to capture carbon dioxide and combat climate change June 6th, 2025

Cambridge chemists discover simple way to build bigger molecules – one carbon at a time June 6th, 2025

Electrifying results shed light on graphene foam as a potential material for lab grown cartilage June 6th, 2025

A 1960s idea inspires NBI researchers to study hitherto inaccessible quantum states June 6th, 2025

Announcements

INRS and ELI deepen strategic partnership to train the next generation in laser science:PhD students will benefit from international mobility and privileged access to cutting-edge infrastructure June 6th, 2025

Electrifying results shed light on graphene foam as a potential material for lab grown cartilage June 6th, 2025

Quantum computers simulate fundamental physics: shedding light on the building blocks of nature June 6th, 2025

A 1960s idea inspires NBI researchers to study hitherto inaccessible quantum states June 6th, 2025

Alliances/Trade associations/Partnerships/Distributorships

Manchester graphene spin-out signs $1billion game-changing deal to help tackle global sustainability challenges: Landmark deal for the commercialisation of graphene April 14th, 2023

Chicago Quantum Exchange welcomes six new partners highlighting quantum technology solutions, from Chicago and beyond September 23rd, 2022

CEA & Partners Present ‘Powerful Step Towards Industrialization’ Of Linear Si Quantum Dot Arrays Using FDSOI Material at VLSI Symposium: Invited paper reports 3-step characterization chain and resulting methodologies and metrics that accelerate learning, provide data on device pe June 17th, 2022

University of Illinois Chicago joins Brookhaven Lab's Quantum Center June 10th, 2022

Printing/Lithography/Inkjet/Inks/Bio-printing/Dyes

Presenting: Ultrasound-based printing of 3D materials—potentially inside the body December 8th, 2023

Simple ballpoint pen can write custom LEDs August 11th, 2023

Disposable electronics on a simple sheet of paper October 7th, 2022

Newly developed technique to improve quantum dots color conversion performance: Researchers created perovskite quantum dot microarrays to achieve better results in full-color light-emitting devices and expand potential applications June 10th, 2022

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project