Home > Press > Tokyo Electron (TEL) Introduces a New 300mm Plasma Treatment Reactor, Trias® SPAi
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Abstract:
Tokyo Electron (TEL) (TOKYO:8035) today announced that the company will begin receiving orders for the Trias® SPAi beginning January, 2009. The new chamber is a 300mm single-wafer tool for oxidation or nitridation.
Tokyo Electron (TEL) Introduces a New 300mm Plasma Treatment Reactor, Trias® SPAi
Tokyo, Japan | Posted on December 1st, 2008 TEL developed the Trias® SPAi to reduce greenhouse gas emissions and improve COO through a smaller footprint and higher throughput. It is based on TEL's popular Trias® SPA, a low temperature plasma nitridation/oxidation process module installed at major DRAM, Flash and Logic customers worldwide. The Trias® SPA creates a high-density, low-electron temperature plasma enabling damage-free processing in advanced radical oxidation and nitridation applications.
Takeshi Okubo, General Manager for TEL's Single Wafer Deposition Business Unit, said, "The Trias SPAi demonstrates TEL's commitment to delivering greener technology. We have worked diligently to reduce the tool's electrical power consumption and CO2 emissions. Our design team has also reduced its footprint, thus reducing the environmental impact at our customer's site. We were able to make these environmentally-conscious advances while still improving the tool's overall productivity."
The tool will be used in a variety of applications, such as oxidation, nitridation, post treatment and refinement in the FEOL (Front end of Line) area.
*Trias is a trademark of Tokyo Electron Limited in Japan and/or other countries
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About Tokyo Electron Limited
Tokyo Electron Ltd., established in 1963, is a leading supplier of innovative semiconductor and FPD production equipment worldwide. In Japan, TEL also distributes computer network related products and electronic components of global leading suppliers. To support this diverse product base, TEL is strategically located around the world. TEL is a publicly held company listed on the Tokyo Stock Exchange.
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Contacts:
Tokyo Electron Ltd.
Michelle Pesez
512-424-1757
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