Nanotechnology Now - Press Release: International SEMATECH North to Expand Immersion Lithography Research Program with Columbia University

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Abstract:
New initiative builds on $10M in funding provided by International SEMATECH North to New York's colleges and universities

International SEMATECH North to Expand Immersion Lithography Research Program with Columbia University

Albany, NY | Posted on May 2nd, 2007

SEMATECH, the world's leading nanoelectronics consortium, and the College of Nanoscale Science and Engineering ("CNSE") of the University at Albany, home to the New York State Center of Excellence in Nanoelectronics and Nanotechnology ("CENN"), announced today that International SEMATECH North ("ISMTN") will provide additional funding to Columbia University to expand a program that is enabling vital research and development in the area of immersion lithography.

The research focuses on the identification and development of novel chemistries to enable double-exposure materials, which hold significant promise for important breakthroughs in immersion lithography that are critical to nanoelectronics manufacturing. The work, which will involve testing of materials produced by Columbia, will be conducted at ISMTN's Resist Test Center ("RTC") at the CNSE CENN using the Immersion Micro-Exposure Tool ("iMET"). ISMTN has already started a project with Columbia to develop high-index materials, and the expanded scope with double exposure materials now covers both of the most likely options of extending immersion lithography.

The additional funding provided by ISMTN to Columbia University more than doubles the initial scope of the project to greater than $700,000. At the same time, it builds on the approximately $10 million that ISMTN has provided to a number of colleges and universities in New York to fund research programs with high potential for significant outcomes in knowledge creation and dissemination, and to produce Ph.D. and M.S.-level scientists and researchers to staff the expanding nanoelectronics cluster in New York.

SEMATECH President and CEO Michael R. Polcari said, "SEMATECH is pleased to expand the innovative and important research into immersion lithography being performed by Columbia University as part of the International SEMATECH North program at the New York State Center of Excellence in Nanoelectronics and Nanotechnology at Albany's College of Nanoscale Science and Engineering. The ability to tap into top-notch colleges and universities throughout New York to help drive fundamental knowledge and technological breakthroughs is a vital factor in SEMATECH's mission to prepare lithography for advanced nanoelectronics manufacturing."

CNSE Vice President and Chief Administrative Officer Dr. Alain E. Kaloyeros said, "The expansion of this critical nanoelectronics R&D program is further demonstration that the creation of a vibrant and globally recognized nanotechnology sector in New York is creating new opportunities for partners from both industry and academia throughout the state. The UAlbany NanoCollege is pleased to provide support and partnership with Columbia University in the effort to enable new advances in the fundamental research that International SEMATECH North is conducting at the New York State Center of Excellence in Nanoelectronics and Nanotechnology at CNSE's Albany NanoTech complex."

Since its location at the CNSE CENN site in 2002, ISMTN has generated $320 million in direct economic impact and created over 1,650 high-tech jobs, while working with more than 330 partner companies in New York, two-thirds of which are located outside the Capital Region.

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About Ualbany Nanocollege
About CNSE. The UAlbany CNSE is the first college in the world dedicated to research, development, education, and deployment in the emerging disciplines of nanoscience, nanoengineering, nanobioscience, and nanoeconomics. In May 2006, it was ranked as the nation's number one college for nanotechnology and microtechnology in the Annual College Ranking by Small Times magazine. CNSE's Albany NanoTech complex is the most advanced research facility of its kind at any university in the world: a $3.5 billion, 450,000-square-foot complex that attracts corporate partners from around the world and offers students a one-of-a-kind academic experience. The UAlbany NanoCollege houses the only fully-integrated, 300mm wafer, computer chip pilot prototyping and demonstration line within 65,000 square feet of Class 1 capable cleanrooms. Over 1,600 scientists, researchers, engineers, students, and faculty work on site at CNSE's Albany NanoTech complex, including IBM, AMD, SONY, Toshiba, Qimonda, Honeywell, ASML, Applied Materials, Tokyo Electron, and Freescale. An expansion currently underway will increase the size of CNSE's Albany NanoTech complex to over 750,000 square feet, including over 80,000 square feet of Class 1 cleanroom space, to house over 2,000 scientists, researchers, engineers, students, and faculty by the end of 2008.

About SEMATECH. For 20 years, SEMATECHŽ ( http://www.sematech.org ) has set global direction, enabled flexible collaboration, and bridged strategic R&D to manufacturing. Today, we continue accelerating the next technology revolution with our nanoelectronics and emerging technology partners.

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