Home > News > Soft Lithography – A Low Cost, Production Method For Producing Nano Sized Features Even On Curved Surfaces
January 21st, 2007
Soft Lithography – A Low Cost, Production Method For Producing Nano Sized Features Even On Curved Surfaces
Abstract:
Soft lithography is so called because it utilises cast moulded stamps made from flexible materials.
The process begins with the creation of a master. The master is made by etching a blank - normally a silicon wafer - with a negative photoresist. This gives a raised pattern of nanometer sized features on the silicon wafer that corresponds with the required channels in the polymer stamp.
Source:
azonano.com
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