Home > News > ASML ships EUV tools to CNSE and IMEC
August 29th, 2006
ASML ships EUV tools to CNSE and IMEC
Abstract:
ASML Holding NV (ASML) announced today that it shipped two extreme ultraviolet (EUV) Alpha Demo Tools (ADT) to customers. Both the College of Nanoscale Science and Engineering (CNSE) of the State University of New York (SUNY) at Albany, N.Y., and the nanoelectronics research institute IMEC in Leuven, Belgium, have received these industry first, full field EUV systems.
Source:
euronext.com
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