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Home > News > Spherical nanoparticles put a shine on semiconductor wafers

June 8th, 2006

Spherical nanoparticles put a shine on semiconductor wafers

Abstract:
An international team has come up with a way of making spherical single-crystal nanoparticles of ceria. The particles could benefit the chemical-mechanical planarization of advanced integrated circuits, producing fewer defects in the wafers they are used to polish than today's irregularly-shaped ceria nanoparticles.

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