Nanotechnology Now - Press Release: Leti and HORIBA Scientific to Host Webinar on Ultrafast Characterization Tool: Plasma Profiling Time-of-Flight Mass Spectrometer Tool Cuts Optimization Time In Layer Deposition and Fabrication of Wide Range of Applications

Home > Press > Leti and HORIBA Scientific to Host Webinar on Ultrafast Characterization Tool: Plasma Profiling Time-of-Flight Mass Spectrometer Tool Cuts Optimization Time In Layer Deposition and Fabrication of Wide Range of Applications

Abstract:
Leti, a research institute of CEA Tech, and HORIBA Scientific, global leader in spectroscopy solutions building on Jobin Yvon core technologies, today announced a webinar on April 4, 2017, to show the characterization capabilities of HORIBA Scientific’s new Plasma Profiling Time-of-Flight Mass Spectrometer (PP-TOFMS) instrument.

Leti and HORIBA Scientific to Host Webinar on Ultrafast Characterization Tool: Plasma Profiling Time-of-Flight Mass Spectrometer Tool Cuts Optimization Time In Layer Deposition and Fabrication of Wide Range of Applications

Grenoble and Palaiseau, France | Posted on March 27th, 2017

As an innovative technique for material characterization, Plasma Profiling TOFMS provides elemental composition as a function of the depth of solid materials. This depth profiling technique consists of a glow discharge plasma source that erodes and ionizes sample material, coupled to an ultrafast time-of-flight mass spectrometer.

This process dramatically reduces optimization time in layer-deposition and fabrication of a wide range of materials applications, such as microelectronics, photovoltaics and optoelectronics. The tool is suited for doping monitoring, contamination detection and identification, and failure analysis.

The speed of the plasma profiling TOFMS analysis (few minutes) results from a variety of features, including (i) a high-density, low-energy sputtering plasma, (ii) an ultrafast full elemental coverage time-of-flight mass detection and (iii) minimal sample preparation and no UHV sample transfer. In addition, the full elemental coverage and the standard-free semi-quantitative ability make PP-TOFMS a valuable tool for fast-and-simple unexpected contaminant detection. Retrospective analysis and fast feedback are thus possible, limiting costly and time-consuming analyses and allowing rapid process development.

“HORIBA’s novel materials characterization technique in a very compact instrument allows users to determine in a matter of minutes the depth distribution of any element for a wide range of materials,” said Agnès Tempez, HORIBA Scientific product manager. “Our April 4 webinar with Leti will show numerous examples of the potential of our novel depth profiling technique for the development of thin films and devices, from growth to processing. It will also compare PP-TOFMS with the conventional more time-demanding SIMS depth profiling technique.”

As part of a collaboration begun in 2015, Leti and HORIBA FRANCE SAS have installed HORIBA’s latest plasma profiling time-of-flight mass spectrometer in Leti’s cleanroom.

“HORIBA’s Plasma Profiling TOFMS tool is a user-friendly instrument that can easily be implemented in a variety of scientific and engineering applications for many of Leti’s industrial partners,” said Emmanuel Nolot, Leti metrology leader. “We will continue to collaborate with HORIBA to test it on Leti’s 200mm and 300mm advanced CMOS/3D platforms, the 200mm MEMS platform and our world-class nanoscale characterization platform.”

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About Leti
Leti, a technology research institute at CEA Tech, is a global leader in miniaturization technologies enabling smart, energy-efficient and secure solutions for industry. Founded in 1967, Leti pioneers micro-& nanotechnologies, tailoring differentiating applicative solutions for global companies, SMEs and startups. Leti tackles critical challenges in healthcare, energy and digital migration. From sensors to data processing and computing solutions, Leti’s multidisciplinary teams deliver solid expertise, leveraging world-class pre-industrialization facilities. With a staff of more than 1,900, a portfolio of 2,700 patents, 91,500 sq. ft. of cleanroom space and a clear IP policy, the institute is based in Grenoble, France, and has offices in Silicon Valley and Tokyo. Leti has launched 60 startups and is a member of the Carnot Institutes network. This year, the institute celebrates its 50th anniversary.

CEA Tech is the technology research branch of the French Alternative Energies and Atomic Energy Commission (CEA), a key player in innovative R&D, defence & security, nuclear energy, technological research for industry and fundamental science, identified by Thomson Reuters as the second most innovative research organization in the world. CEA Tech leverages a unique innovation-driven culture and unrivalled expertise to develop and disseminate new technologies for industry, helping to create high-end products and provide a competitive edge.

Follow us on www.leti-cea.com and via Twitter @CEA_Leti.

About HORIBA Scientific
HORIBA Scientific provides an extensive array of instruments and solutions for applications across a broad range of scientific R&D and QC measurements. HORIBA Scientific is a world leader in diffraction gratings, Raman microscopy, SPM coupled to Raman, elemental analysis, fluorescence, forensics, GDS, ICP, optical spectroscopy, OEM spectrometers, particle characterization, spectroscopic ellipsometry, SPRi, sulfur-in-oil, water quality and XRF. Our instruments are found in universities and industries around the world. Proven quality and trusted performance have established widespread confidence in the HORIBA Brand.
www.horiba.com/scientific

The HORIBA Group of worldwide companies, part of HORIBA, Ltd. headquartered in Kyoto, Japan, provides an extensive array of instruments and systems for applications ranging from automotive R&D, process and environmental monitoring, in-vitro medical diagnostics, semiconductor manufacturing and metrology, to a broad range of scientific R&D and QC measurements.

For more information, please click here

Contacts:
Leti Press Contact
Agency
+33 6 74 93 23 47

HORIBA FRANCE SAS Press Contact
Odile Hirsch
+33 1 69 74 72 00

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