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| The award‐winning Nanonics 3TB4000, an integrated AFM/SEM/FIB system |
Abstract:
Nanonics is proud to announce that our triple beam integrated AFM/SEM/FIB system, the Nanonics 3TB4000, was judged one of the ten best microscopy innovations in 2013 and is the recipient of the prestigious
2013 Microscopy Today Innovation Award. The 3TB4000 provides the ultimate 3D nanoscale characterization capability through a revolutionary innovation of open architecture that provides open access to the SEM/FIB beams without any obstruction or interference to the injectors, detectors, or beam lines.
Microscopy Today Award recipient
Israel | Posted on September 2nd, 2013With the 3TB4000, the SEM, FIB, and AFM can now be used to provide complimentary information in order to provide a complete characterization of material by taking advantage of the functional and high resolution 3D capabilities of AFM, the large field of view and rapid scanning of the SEM, and the fabrication/material removal capability of the FIB. Applications demonstrating this powerful new capability have been shown in diverse areas including sidewall imaging in semiconductors, locating and measuring optical properties of individual metal oxide nanowires or mechanical properties of surface features, and assessing AFM probes in situ while imaging.
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