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August 31st, 2007

Group of 10 to Tackle Killer Particles

Abstract:
Ex-IBMer turned consultant Paul Castrucci is taking aim at what he thinks will be a yield limiter for the 45 nm generation: killer nanoparticles that are held to the wafer surface by strong Van der Waals forces. Such particles, measuring 20-25 nm, are difficult to remove with traditional wafer cleaning equipment and could result in major yield problems on ultra high density ICs. He believes his research will show that supercritical cleaning will provide the solution.

Source:
semiconductor.net

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