Nanotechnology Now - Press Release: Tegal Receives Order for 900 Series Plasma Etch System from Japanese Sensor and Control System Maker

Home > Press > Tegal Receives Order for 900 Series Plasma Etch System from Japanese Sensor and Control System Maker

Abstract:

Order Received Through Newly-Established Japan Distributor Noah Corporation

Tegal Receives Order for 900 Series Plasma Etch System from Japanese Sensor and Control System Maker

PETALUMA, CA | Posted on August 16th, 2007

-Tegal Corporation (NASDAQ:TGAL), a leading designer and manufacturer of plasma etch and deposition systems used in the production of integrated circuits, MEMS, and nanotechnology devices, today announced that it has received an order for a Tegal 915 batch etch system from a leading Japanese sensor and control system maker. The new Tegal 915 system will be used for photoresist strip applications in the customer's 200mm microswitch fabrication line.

"We are pleased that Noah Corporation, our recently-appointed Japanese representative, has closed this new 900 Series system sale for us in Japan. Noah has been providing excellent technical support to Tegal's Japanese customers for several months already, and we expect additional sales of both our plasma etch and PVD tools in Japan soon," said Vahan Tchakerian, Tegal's Vice President of Global Sales.

The Tegal 915 is one of a series of diode and batch plasma etch systems produced by Tegal, the industry pioneer in commercial single-wafer plasma etching. Over 1,500 systems in the 900 Series have been shipped to date, providing reliable and cost-effective support for a wide range of plasma etch processes. Tegal 915 and 900ACS Series plasma etch tools are optimized for photoresist stripping, solar "coin stack" etching, and pad, zero layer, descum, non-selective nitride, backside, and planarization etching, for HB-LED, MEMS, Power Device, and Optoelectronic device fabrication. The 915 and 900ACS Series platforms can accommodate 75mm to 200mm round, square or rectangular substrates.

Tegal 900 Series customers should also take note that an Advanced Control System (ACS) upgrade is available exclusively from Tegal as a field or factory retrofit for the existing installed base of 900 and 980 series systems. The ACS features a fully integrated graphical user interface, parametric data logging, full factory automation support, and throughput enhancements for the wafer-handling system. For information on the 900 series ACS upgrade package, please contact your local Tegal representative or email .

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About Tegal Corporation
Tegal provides process and equipment solutions to leading edge suppliers of advanced semiconductor, optoelectronic, MEMS, and nanotechnology devices. Incorporating unique, patented etch and deposition technologies, Tegal’s system solutions are backed by over 35 years of advanced development and over 100 patents. Some examples of devices enabled by Tegal technology are energy efficient memories found in portable computers, cellphones, PDAs and RFID applications; megapixel imaging chips used in digital and cellphone cameras; power amplifiers for portable handsets and wireless networking gear; MEMS devices like accelerometers for automotive airbags, microfluidic control devices for ink jet printers; and laboratory-on-a-chip medical test kits.

Safe Harbor Statement

Except for historical information, matters discussed in this news release contain forward-looking statements within the meaning of Section 27A of the Securities Act and Section 21E of the Exchange Act. Forward-looking statements, which are based on assumptions and describe our future plans, strategies and expectations, are generally identifiable by the use of the words "anticipate," "believe," "estimate," "expect," "intend," "project" or similar expressions. These forward-looking statements are subject to risks, uncertainties and assumptions about the Company including, but not limited to industry conditions, economic conditions, acceptance of new technologies and market acceptance of the Company's products and services. All forward-looking statements attributable to us or persons acting on our behalf are expressly qualified in their entirety by the cautionary statements in this paragraph. For a further discussion of these risks and uncertainties, please refer to the Company's periodic filings with the Securities and Exchange Commission.

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Contacts:
Tegal Corporation
John Almerico, 707-763-5600
(Marketing Director, Etch Products)
or
The Blue Shirt Group
Rakesh Mehta, 415-217-7722
Chris Danne, 415-217-7722

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