Home > News > Aerotech announces ABRT Air-Bearing Stage
June 1st, 2007
Aerotech announces ABRT Air-Bearing Stage
Abstract:
Aerotech's ABRT series rotary air-bearing stages provide 360-degree continuous travel with resolution to 0.027 arc sec. Velocity stability and error motion performance are exceptional. Payload capacity is up to 69 kg due to the outstanding radial and axial stiffness. The ABRT is designed to meet the exacting requirements of DVD mastering, wafer inspection, high precision metrology applications, X-ray diffraction systems, optical inspection and fabrication, and MEMS/nanotechnology device fabrication.
Source:
automation.com
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