Home > News > Metallic glass promises to become a useful material for nanotechnology fabrication
January 25th, 2007
Metallic glass promises to become a useful material for nanotechnology fabrication
Abstract:
Micro-and/or nano-electromechanical systems (MEMS/NEMS) are the basis of future nanotechnology, because they combine miniature sensors and actuators with electronics. The selection of appropriate materials for MEMS/NEMS fabrication is based on the careful consideration of a material's properties with regard to its intended application. For example, many MEMS devices, such as pressure, chemical and bio sensors, rely on actuation of a membrane structure and require a high fracture toughness material for the enhanced durability and shock resistance. On the other hand, for fabrication of controlled nanostructures, the material should be machinable up to atomic level. Currently, the materials used for MEMS/NEMS fabrication are based on silicon or oxides, which are brittle and have size effects such as lattice defects, anisotropy, grains and grain boundaries. These effects are the limiting factors in the reduction of pattern size, especially when a dimension of the pattern approaches a few tenths of a nanometer. Researchers in Japan now have introduced zirconium-based glass thin films for the fabrication of 3D micro- and nanostructures. These materials exhibit excellent micro/nano-formability under very low stresses, and are expected to become one of the most useful materials for fabricating NEMS/MEMS devices.
Source:
nanowerk.com
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