Nanotechnology Now - News Story: XVision 300 creates 3D defect analysis at the nano range

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August 21st, 2006

XVision 300 creates 3D defect analysis at the nano range

Abstract:
Carl Zeiss SMT's Nano Technology Systems division (Carl Zeiss NTS) and SII NanoTechnology Inc. (SIINT) have jointly introduced the XVision 300 Focused Ion Beam (FIB)/Scanning Electron Microscope (SEM) hybrid system.

Source:
fabtech.org

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Carl Zeiss

SII NanoTechnology Inc.

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