Home > News > Deep-sub-wavelength Lithography
February 16th, 2006
Deep-sub-wavelength Lithography
Abstract:
Chris Phoenix: A bit over a year ago, we posted about deep-sub-wavelength imaging. Now, an article in CCNews describes deep-sub-wavelength lithography. Features as small as 26 nanometers have been generated.
Source:
Responsible Nanotechnology
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