Nanotechnology Now - News Story: Laser makes 3D atom probe suitable for chip research

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July 5th, 2005

Laser makes 3D atom probe suitable for chip research

Abstract:
Oxford NanoScience Ltd. has said that its 3DAP three-dimensional atom probe can now be used on silicon structures, so that semiconductor device manufacturers can determine both the elemental identity and position of individual atoms.

Source:
EETimes

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