Home > News > Forging nanochannels without nanolithography
October 2nd, 2003
Forging nanochannels without nanolithography
Abstract:
Scientists from the California Institute of Technology, US, have come up with a way of making nanochannels without using nanolithography. The process employs basic CMOS fabrication techniques such as chemical-mechanical polishing and thermal oxidation.
Source:
Nanotechweb
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