Home > News > Nanolitho effort harnesses self-assembly
August 6th, 2003
Nanolitho effort harnesses self-assembly
Abstract:
Nanoscale patterning of silicon substrates with regular, repeatable, atomically perfect application- specific templates could enable manufacturable nanoscale chips within the decade, according to scientists at the University of Wisconsin's Materials Research Science and Engineering Center (Madison). (more on earlier story)
Source:
EETimes
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