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July 13th, 2003
Intel keeping options open at 32-nm node
Abstract:
Despite its decision to pass on 157-nm lithography at the 45-nm node, Intel Corp. is "keeping all of its options open" for the 32-nm node, including 193-immersion lithography and 157-nm tools, said Peter Silverman, director of lithography capital equipment at Intel Corp.
Source:
EETimes
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