Home > News > ASML, Canon, Nikon take dip into immersion litho
February 28th, 2003
ASML, Canon, Nikon take dip into immersion litho
Abstract:
ASML Holding NV, Canon Inc., and Nikon Corp. separately disclosed they are taking the first steps in what could be the next "breakthrough" in chip production: immersion lithography.
Source:
EETimes
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