Home > News > Closed-Loop XYZ-Piezo-Scanner Provides 25 Picometers Resolution from PI
March 23rd, 2007
Closed-Loop XYZ-Piezo-Scanner Provides 25 Picometers Resolution from PI
Abstract:
Features & Advantages:
* High-Speed XYZ Scanner for AFM / SPM & Manipulation Tool for Nanotechnology
* Custom, High-Stiffness Shear Piezo Drives Provide up to 10 kHz Resonant Frequency for Faster Response and Higher Scanning Performance
* Ultra-Low-Noise Controller: 25 Picometers (0.025 nm) Resolution
* Capacitive Feedback for Exceptional Precision and Linearity
* Parallel Metrology for Better Multi-Axis Accuracy
* Small & Rugged Design with Titanium Case
* Vacuum Compatible
Source:
optics.org
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