Home > News > Method simplifies large-scale nanofabrication process
October 27th, 2006
Method simplifies large-scale nanofabrication process
Abstract:
Professor Chang-Jin "CJ" Kim and Chang-Hwan Choi from the Micro- and Nanomanufacturing Laboratory at UCLA's Mechanical and Aerospace Engineering Department, came up with a simple but efficient nanofabrication method to create a dense (nanoscale pitch) array of silicon nanostructures (post and grate) of varying height and shape over a large sample area.
Source:
nanowerk.com
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