Home > News > Desktop Apparatus Enabling Nanometer-scale Fabrication
April 3rd, 2006
Desktop Apparatus Enabling Nanometer-scale Fabrication
Abstract:
The National Institute of Advanced Industrial Science and Technology (AIST) has developed a nano-fabrication technique utilizing a thermal lithography method resulting from the combination of visible-light lithography using a semi-conductor laser with a thermally nonlinear material.
Source:
japancorp.net
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