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Abstract:
Microelectronics Centre at MICRONOVA, Helsinki University of Technology and Beneq enter into long term collaboration agreement

Micronova and Beneq announce long term collaboration

Vantaa, Finland | Posted on December 21, 2005

Beneq and the Microelectronics Centre at Micronova announced that following to the delivery of Beneq's ALD (Atomic Layer Deposition) reactor TFS 500 to Micronova, parties have entered into a long term collaboration agreement where the aim is to study and develop a wide range of thin film and surface treatment technologies and applications.

As part of the agreement, Beneq will deliver a new ALD reactor to be installed in Micronova's state-of-the art clean room. The reactor will be utilized for various research and development purposes as well as for verifying the use of ALD in new industrial applications. Beneq and Micronova will share the use of the reactor so that it will best serve the interest of both parties. Beneq plans to utilize the new reactor to serve as it's R&D platform and will implement new features into the reactor from time to time.

During the collaboration Micronova will provide Beneq with research and development services in order to support Beneq's own R&D program as well as the various needs of Beneq's customers. By working together Micronova and Beneq will be able to address the fast developing requirements and challenges in surface- and nanotechnologies.

Atomic layer deposition (ALD) is a chemical deposition technique, which allows the controlled growth of insulating and conducting thin films with atomic precision. ALD thin films have important applications in microelectronics, optical equipment, sensors, biomaterials and nanotechnology.

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About Beneq Oy:
Beneq Oy, Vantaa, Finland, is a supplier of industrial equipment for global markets. Beneq is addressing the market of industrial equipment for producing functional surfaces with latest technology, typically utilizing nanosize materials. Beneq acts as a business facilitator adding value for high-tech partner companies by converting proven innovations into industrial equipment.

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About MICRONOVA:
MICRONOVA is the leading centre for micro- and nanotechnology research in Finland, with R&D groups from the Helsinki University of Technology (TKK ) and Technical Research Centre of Finland (VTT ). The central research focus includes micro-, nano-, and optoelectronic devices, materials, sensors, microsystems and microfabrication techniques.

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Contact:
Mr. Sampo Ahonen
CEO, Beneq Oy, Vantaa, Finland
+358 40 520 1090
sampo.ahonen@beneq.com

Dr. Veli-Matti Airaksinen
Director, Microelectronics Centre, Micronova
Helsinki University of Technology
Espoo, Finland
+358 9 451 6075
veli-matti.airaksinen@tkk.fi

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