Home > News > Ultratech Introduces the LSA100 Laser Spike Anneal System
June 15th, 2004
Ultratech Introduces the LSA100 Laser Spike Anneal System
Abstract:
Ultratech, Inc. today introduced the LSA100 laser spike anneal system -- the first tool built on the company's new Unity Platform(TM), announced earlier today. Featuring the patented laser-processing (LP) technology Ultratech unveiled last year, the LSA100 represents one of the industry's first commercially available laser-processing systems for both development and volume production of 65nm and
smaller devices.
Source:
PRNewswire
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