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February 23rd, 2004

Cutting-Edge Stepper for 65 nm or Smaller Devices

Abstract:
Nikon Corporation is pleased to announce that it has developed and in April 2004 will start receiving orders for the lens-based scanning ArF excimer laser stepper, Nikon Step-and-Repeat System NSR-S308F, for use in the mass-production of advanced 65 nm or smaller devices.

Source:
Nikon

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