Home > News > Tegal moves into atomic layer deposition
November 13th, 2003
Tegal moves into atomic layer deposition
Abstract:
Tegal has signed an agreement to purchase the assets of Simplus Systems Corporation, a privately held developer of nano layer deposition (NLD) cluster tools and processes for barrier, copper seed and high-k dielectric applications based in Fremont, California. The financial terms of the deal, which is expected to be finalized by the end of November, have not yet been disclosed.
Source:
Compound Semiconductor
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