Home > News > Tegal Receives Order for MEMS Applications
October 23rd, 2003
Tegal Receives Order for MEMS Applications
Abstract:
Tegal Corporation (Nasdaq:TGAL) today announced a large European semiconductor manufacturer has ordered two Tegal 980 Series diode plasma etch systems, which will be of key importance for its expansion into fabricating commercial quantities of specialized MEMS (Microelectromechanical Systems) and other nanotechnology devices.
Source:
Businesswire
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