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Home > News > NIST Helps Chip Industry Measure Features by Counting Atoms

August 14th, 2003

NIST Helps Chip Industry Measure Features by Counting Atoms

Abstract:
The quest to develop the nanotechnology equivalent of rulers—length-measurement references based on the spacing of atoms in a perfectly ordered crystal—has inspired a burst of innovation at the National Institute of Standards and Technology (NIST). Progress to date has yielded a novel device that can resolve distances smaller than the radius of an atom and a reliable method for writing 10-nanometer-sized features on silicon. (More on NIST and Semiconductors)

Source:
NIST

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