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Home > News > Lab claims world's best MEMS sensor

June 12th, 2003

Lab claims world's best MEMS sensor

Abstract:
Measuring just 2 microns long by 50 nanometers thick, the silicon cantilevers--like the teeth of a comb--were vibrated by an inexpensive diode laser. Measurements of the frequency of oscillation confirmed that the sensor had detected just 5.5 femtograms.

Source:
EETimes

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