Home > News > New sensor bares faults in smallest possible, most advanced circuits
May 12th, 2003
New sensor bares faults in smallest possible, most advanced circuits
Abstract:
A new scanning microscope developed at Brown University can uncover defects in the smallest and most complex integrated circuits at a resolution 1,000 times greater than current technology. The scanner removes a barrier to further shrinking of integrated circuits: As circuits get smaller, non-visual defects become harder to find.
Source:
EurekAlert
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